Piezoresistive Silicon Stainless Steel Pressure Sensors - SPM402 Series

  • Piezoresistive Silicon Stainless Steel Pressure Sensors
  • Piezoresistive Silicon Stainless Steel Pressure Sensors
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• 5 to 500 PSI Pressure ranges
• -40 to 125°C Temperature Range
• Calibrated and compensated output
• Supply voltage 10V
• O-ring mounting
• High accuracy (max 0.25% linearity and max 0.05% hysteresis)

  • Model Number: SPM402 Series
  • Data Sheet: Date Sheet File
Quantity:
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Product Specification

Piezoresistive Silicon Pressure Sensor for medium pressure ranges

SPM402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPM 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Media isolated sensors are designed to operate in hostile environments, yet provide the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.

The piezoresistive sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique pressure sensor design is at a minimum volume so the accuracy is greatly improved. The SPM 402 silicon pressure sensor is a thermally compensated device and has a millivolt output of up to 210mV at a 1mA supply current (or supply voltage 10V). This new pressure sensor offers design engineers excellent performance in various applications, especially for mid to high pressure and smaller solutions. 

SPM402 Series Piezoresistive Silicon Pressure Sensors Features
• Calibrated and compensated
• With media separation
• Excellent chemical resistance
• O-ring mounting
• Pressure ranges: 5 to 500 psi

SPM402 Series Piezoresistive Silicon Pressure Sensors Applications
• Industrial
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)
• Process industry

SPM402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply current 1 mA at reference conditions unless otherwise specified.

Standard Pressure Ranges
 PSI 
  bar  
Output signal (Offset) [mV]
Output signal (Span) [mV]
Proof pressure
[PSI/bar]
Negative pressure
[PSI/bar]
Burst pressure
[PSI/bar]
min.
typ.
max.
min.
typ.
max.
5 0.35 -2
0
2
50
75 100 30 2 -- -- 45 ≥ 3
15 1 100 145 210 75 5 -- -- 112 ≥ 7.5
30 2 95 150 200 150 10 -- -- 225 ≥ 15
50 3.5 80 125 180 250 17.5 -- -- 375 ≥ 25
100 7 100 150 210 500 35 -15
-1
750 ≥ 50
300 20 95 150 200 1200 80 -15
-1
1800 ≥ 120
500 35 1200 175 240 1500 105 -15
-1
3150 ≥ 210
Supply / Performance

min.
typ.
max.
Supply current            [mA]
- 1 3
Supply voltage               [V]
- - 10
Linearity      [% FSO BFSL]
-0.25
± 0.1
0.25
Hysteresis              [%FSO]
-0.05
± 0.03
0.05
Input impedance          [kΩ]
4.0 to 6.0
Output impedance       [kΩ]
4.0 to 6.0
Insulation resistance   [MΩ]
50 (between housing and sensor chip) @ 50 V DC
Thermal errors

min.
typ.
max.
TC Offset        [% FS0/10K]
-0.7
-0.1
0.7
TC Span         [% FS0/10K]
-2.4
-1.9
-1.6
TC resistance        [%/10K]
2.4
2.75
3.3
All parameteres are measured in the temperature range of 0 to 70 °C (32 to 158 °F)
Operating temperature ranges
Media
-40 to 125 °C  (-40 to 257 °F)
Storage
-40 to 125 °C  (-40 to 257 °F)
Mecanical stability
Vibration
10 g RMS (20 to 2000 Hz)
Schock
100 g / 11 ms
Electrical conditions
Standard
4 solder pads ppitch 2.54
Materials
Housing
Stainless steel 316L (1.4404)
Diaphragm
Stainless steel 316L (1.4435)
Media wetted parts
Housing, diaphragm
Miscellaneous
Installation position
any
Protection class
IP 00
Weight
Standard: approx. 10 g 
Sealing
O-Ring 15.5 x 1.5 (material: FKM)

SPM402 Series Piezoresistive Silicon Pressure Sensors Ordering Codes


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