Gas Mass Flow Meters - MF5000 Series

  • Gas Mass Flow Meters
  • Gas Mass Flow Meters
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• ​Accuracy: ±(1.5+0.5 FS)%
• Environment:
- Temperature: -20 ~ +60℃;
- Humidity: < 95%RH (No icing or condensation )
• Flow channel: 3 ~ 19 mm
• Display: Flow rate and accumulated flow
• Interface: 4 ~ 20 mA; RS485; Pulse
• Calibration: Air @ 20℃; 101.325 kPa

  • Model Number: MF5000 Series
  • Data Sheet: Date Sheet File
Quantity:
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Product Specification

MF5000 series Gas Mass Flow Meters General description

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.5FS)% or better depending on the requests.  The meters can work at an environment of -20 to 60°C and pressure up to 1.5 MPa.  Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.  

MF5000 Series have 5 designs, with model number:MF5003/MF5006/MF5008/MF5012/MF5019.


MF5000 series Gas Mass Flow Meters Features and Applications
- Highly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
- Directly sense mass flow using thermal mass flow principle
- Proprietary MEMS sensor package design for better reliability
- Standard 12 ~ 24 Vdc power supply
- Low pressure loss forreducing energy cost
- Industrial standard Modbus protocol for easy networking and remote control


MF5000 series Gas Mass Flow Meters Mechanical Dimensions


MF5000 series Gas Mass Flow Meters Specifications

Accuracy
±(1.5+0.5 FS)%
Environment
Temperature: -20 ~ +60℃;
Humidity: < 95%RH (No icing or condensation)
Flow channel
3 ~ 19 mm
Display
Flow rate and accumulated flow
Interface
4 ~ 20 mA; RS485; Pulse
Calibration
Air @ 20℃; 101.325 kPa
Protection
IP40 (Without Ex proof model); IP66 (With Ex proof model)
Ex Proof
Ex d IIC T4
Note:the above parameters are applicable at 20℃ and 101.325 kPa


MF5000 series Gas Mass Flow Meters Production selection

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